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You are here Instrumentation > Focused Ion Beam (FIB) Technologies > FEI Strata 235DB

FEI Strata 235DB

The FEI Strata 235DB is a dual beam FIB/ SEM system equipped with multiple electron detectors, and also includes a secondary ion detector. The system has a digital scan board to help with complex milling patterns and it also has electron and ion beam lithography capability. The FIB has a 4 cartridge gas injection system (GIS) for either enhanced etching, or deposition of metal/insulator for protection layers and/or circuit editing.

Technical Specifications

  • Ion beam currents range from 1 pA – 20 nA.
  • Ion beam resolution is ~7 nm.
  • SEM resolution is ~5 nm.
FEI Strata 235DB