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    • CRANN Executive Director member of Research and Innovation Policy Advisory Forum
    • CRANN Director appointed to National Science Advice Forum
    • Remembering Professor Michael Coey (1945–2025): Oral‑History Interview Released
    • CRANN Director gives keynote at 4th International Conference on Materials Genome
    • Scientists discover how water erosion contributes to generation of micro and nanoplastics linked to cardiovascular diseases
    • CRANN researcher attends the 74th Lindau Nobel Laureate Meeting
    • CRANN Researcher elected as Fellow of The Royal Society
    • AMBER & CRANN researchers highlighted in Science Insights article - 20yrs of Graphene
    • Prof Sanvito - speaks to Newstalk on need for a National Super Computer
    • CRANN Researcher gives Diels-Planck-Lecture and receives Medal
    • Team Install World's 1st User Adjustable Pole-piece Electron Microscope Lens at Sandia National Laboratories
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Contact Us Naughton Institute
Trinity College Dublin
Dublin 2
Ireland

View the contact page for more contact and location information

Email sanvitos@tcd.ie Gaeilge
  • Advanced Microscopy Laboratory
  • Instrumentation
  • Electron Beam Lithography

Electron Beam Lithography

Zeiss SUPRA 40

Zeiss SUPRA 40

The Supra FESEM is primarily used for high resolution electron beam lithography and imaging purposes. Learn more...

Elionix ELS 7700

Elionix ELS 7700

The Elionix ELS 7700 is a dedicated 75 kV electron beam lithography system. Equipped with a laser interferometer controlled stage. Learn more...

Advanced Microscopy Laboratory

  • Instrumentation
    • Transmission Electron Microscopes (STEM/TEM)
      • The Nion UltraSTEM
      • JEOL 2100 LaB TEM
      • FEI Titan 80 – 300kV FEG S/TEM
    • Scanning Electron Microscopes
      • Zeiss ULTRA plus Cryo SEM
      • Zeiss ULTRA plus
    • Electron Beam Lithography
      • Zeiss SUPRA 40
      • Elionix ELS 7700
    • Focused Ion Beam (FIB) Technologies
      • Zeiss AURIGA Focused Ion Beam
      • Zeiss ORION Nanofab
      • FEI Strata 235DB
    • Sample Preparation
      • Fishione 1040 NanoMill
  • Highlights
  • Industry
  • What we do
    • Insitu
  • Vacancies
  • Seminars & Events
  • Access & Contact
  • Crann
  • Advanced Microscopy Laboratory
  • Instrumentation
  • Electron Beam Lithography

Updated 23 December 2024

Trinity College Dublin, The University of Dublin.
College Green, Dublin 2, Ireland T: +353 1 896 1000

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