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Contact Us Naughton Institute
Trinity College Dublin
Dublin 2
Ireland

View the contact page for more contact and location information

Email sanvitos@tcd.ie Gaeilge
  • Advanced Microscopy Laboratory
  • Instrumentation
  • Electron Beam Lithography

Electron Beam Lithography

Zeiss SUPRA 40

Zeiss SUPRA 40

The Supra FESEM is primarily used for high resolution electron beam lithography and imaging purposes. Learn more...

Elionix ELS 7700

Elionix ELS 7700

The Elionix ELS 7700 is a dedicated 75 kV electron beam lithography system. Equipped with a laser interferometer controlled stage. Learn more...

Advanced Microscopy Laboratory

  • Instrumentation
    • Transmission Electron Microscopes (STEM/TEM)
      • The Nion UltraSTEM
      • JEOL 2100 LaB TEM
      • FEI Titan 80 – 300kV FEG S/TEM
    • Scanning Electron Microscopes
      • Zeiss ULTRA plus Cryo SEM
      • Zeiss ULTRA plus
    • Electron Beam Lithography
      • Zeiss SUPRA 40
      • Elionix ELS 7700
    • Focused Ion Beam (FIB) Technologies
      • Zeiss AURIGA Focused Ion Beam
      • Zeiss ORION Nanofab
      • FEI Strata 235DB
    • Sample Preparation
      • Fishione 1040 NanoMill
  • Highlights
  • Industry
  • What we do
    • Insitu
  • Vacancies
  • Seminars & Events
  • Access & Contact
  • Crann
  • Advanced Microscopy Laboratory
  • Instrumentation
  • Electron Beam Lithography

Updated 23 December 2024

Trinity College Dublin, The University of Dublin.
College Green, Dublin 2, Ireland T: +353 1 896 1000

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