FEI Strata 235DB
The FEI Strata 235DB is a dual beam FIB/ SEM system equipped with multiple electron detectors, and also includes a secondary ion detector. The system has a digital scan board to help with complex milling patterns and it also has electron and ion beam lithography capability. The FIB has a 4 cartridge gas injection system (GIS) for either enhanced etching, or deposition of metal/insulator for protection layers and/or circuit editing.
- Ion beam currents range from 1 pA – 20 nA.
- Ion beam resolution is ~7 nm.
- SEM resolution is ~5 nm.